Vibration Control of Flexible Mode for a Beam-Type Substrate Transport Robot
نویسندگان
چکیده
منابع مشابه
Vibration Control of Flexible Mode for a Beam-Type Substrate Transport Robot
Beam‐type substrate transport robots are widely used to handle substrates, especially in the solar cell manufacturing process. To reduce the takt time and increase productivity, accurate position control becomes increasingly important as the size of the substrate increases. However, the vibration caused by the flexible forks in beam‐type robots interferes with ...
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ژورنال
عنوان ژورنال: International Journal of Advanced Robotic Systems
سال: 2013
ISSN: 1729-8814,1729-8814
DOI: 10.5772/56752